发明名称 APPARATUS AND METHOD FOR CLEANING, SYSTEM AND METHOD FOR PROCESSING AN CONTAMINATED ORGANIC MATERIALS USING THE SAME
摘要 The present invention relates to a cleaning apparatus, a cleaning method and a system and a method for processing an organic material using the same, reducing a processing time required for a cleaning process for cleaning a cleaning target object and allowing bulk processing of the cleaning target object with low costs. The present invention provides the cleaning apparatus, which comprises at least one filter member, a cleaning tank, a filter holder, a solvent supply unit, a solvent reception tank, a heating unit and a cooling unit, the cleaning method using the same and the system and the method for processing an organic material. The filter member allows a cleaning target object having foreign substance remaining on the surface thereof to be received therein. The cleaning tank allows the filter member to be detachably coupled thereto. The filter holder is arranged on the cleaning tank to hold the filter member. The solvent supply unit passes through the filter member to supply solvent for removing the foreign substance from the cleaning target object to an interior space of the filter member through interaction with the foreign substance. The solvent reception tank allows a mixture discharged from the cleaning tank to be introduced, the mixture including the solvent passing through the filter member and the foreign substance separated from the cleaning target object. The heating unit heats the mixture received in the solvent reception tank or initial solvent to evaporate only a pure solvent element. The cooling unit cools and condenses the evaporated solvent to supply the evaporated solvent in a liquid state to the filter member.
申请公布号 KR20160113431(A) 申请公布日期 2016.09.29
申请号 KR20150038623 申请日期 2015.03.20
申请人 DMS CO., LTD. 发明人 PARK, YONG SEOK;LEE, JONG KWAN;KIM, JUN TAK
分类号 H01L51/56;H01L21/02 主分类号 H01L51/56
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