| 摘要 |
A variable wavelength interference filter (5, 5A) includes a stationary substrate (51, 51A) and a movable substrate (52) opposed to each other, the stationary substrate includes a stationary reflecting film (541), a first drive electrode (551), and a first capacitance detecting electrode (561), and the movable substrate includes a movable reflecting film (542) arranged to have an inter-reflecting film gap (G1) with the stationary substrate, a second drive electrode (552) arranged to have an inter-drive electrode gap (G2) with the first drive electrode, and a second capacitance detecting electrode (562) arranged to have an inter-capacitance detecting electrode gap (G3) with the first capacitance detecting electrode. The capacitance detecting electrodes are the electrodes for detecting the capacitance between the electrodes. The gap amount of the inter-reflecting film gap is changed by the drive electrodes. The gap amount of the inter-reflecting film gap, the gap amount of the inter-drive electrode gap, and the gap amount of the inter-capacitance detecting electrode gap are different from each other. |
