LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS AND PIEZOELECTRIC ELEMENT

摘要

A piezoelectric element includes a plurality of individual electrodes, a piezoelectric layer formed on each of individual electrodes, and a common electrode which is formed on the piezoelectric layer and is an electrode common to the individual electrodes. Further, a protection film covering a region, which is not covered by the common electrode on the individual electrode, is provided.

主权项

1. A piezoelectric device comprising:
a substrate having a first major surface and a second major surface; a chamber formed in the substrate, the chamber including a sidewall having a first end at the first major surface and a second end at the second major surface; a first electrode formed on the first major surface of substrate, and overlapping the first end; a piezoelectric layer formed on the first electrode; a second electrode formed on the piezoelectric layer; and a protection layer formed on the piezoelectric layer and the second electrode, wherein the protection layer is laterally offset from the first end in a plan view.