| 摘要 |
PROBLEM TO BE SOLVED: To enable the use of elements in a spare region as spare elements after verification of a semiconductor testing apparatus, by electrically providing defective elements, without physically destroying the elements, in a semiconductor device for verifying a semiconductor testing apparatus that tests the semiconductor device. SOLUTION: A plurality of elements are formed in the element region 2, and elements changing with the elements in the element region 2 are formed in the spare region 3. A changing circuit 4 changes a part of the elements in the element region 2 with the elements in the spare region 3. A change-setting circuit 5 is electrically designed to a predetermined state so as to return the element state in the spare region 3 to an original state, and generates defective elements. When verifying the semiconductor testing apparatus, the elements in the element region 2 are changed with the elements in the spare region 3, and purposely generates the defective elements, by making the state of the elements in the spare region 3 to a predetermined state. The semiconductor testing apparatus is verified whether the defective elopements are detected at an intended place. After the verification, the state of the elements in the spare region 3 is thus returned to the original state. COPYRIGHT: (C)2006,JPO&NCIPI
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