| 摘要 |
PROBLEM TO BE SOLVED: To efficiently form a gap between electrodes constituting an electrostatic capacity element, in a capacitance detecting type dynamic quantity sensor. SOLUTION: A layered substrate having three-layer structure with an insulating layer 2 formed between a support layer 1 and an active layer 3 is processed to form this dynamic quantity sensor. A frame 11, a beam 12 and a weight body 13 are formed by etching the support layer 1. An electrode support part 21 and a gap 22 are formed by wet-etching the insulating layer 2. A fixed electrode 31 is formed by etching the active layer 3. The beam 12 is a flexible member fixed onto the frame 11, and supports movably the weight body 13. The weight body 13 is able to be vibrated and moved twistedly by force applied from an outside. Holes are formed further in the fixed electrode 31 to enhance a turn-around characteristic of an etching solution when forming the gap 22. COPYRIGHT: (C)2006,JPO&NCIPI
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