| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thin-film piezo-resonator device and its manufacturing method that acquire proper frequency characteristics and have high reliability. <P>SOLUTION: The thin film piezo-resonator device has a substrate having a prescribed wiring; the thin-film piezo-resonator mounted on the substrate via a gold bump by a flip-chip bonding method; a setting resin layer using ultraviolet rays, together with heat which is filled between the substrate and the thin-film piezo-resonator so as to expose a vibrator of the thin-film piezo-resonator, and coats at least a part of a side face of the thin-film piezo-resonator; and a mold resin layer to coat the thin-film piezo-resonator and the resin layer. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
