VERTICAL CAVITY SURFACE EMITTING LASER AND FABRICATING METHOD THEREOF

摘要

A vertical cavity surface emitting laser and a manufacturing method thereof are provided to generate a laser beam at a desired mode by using a reflective lens having a curvature which becomes smaller from a center to an edge of the lens. A vertical cavity surface emitting laser includes a reflective laser(260) and an upper electrode(202). The reflective laser is formed at a center of a contact layer. The upper electrode is apart from the reflective laser by a predetermined distance and encloses an edge of the reflective laser. The vertical cavity surface emitting laser includes a lower reflective mirror(220), an upper reflective mirror(240), and an oscillation region(230). The lower reflective mirror is formed on a substrate. The upper reflective mirror is formed on the lower reflective mirror. The oscillation region is formed between the upper and lower reflective mirrors, generates the laser beam, and outputs the laser beam toward the upper reflective mirror.