| 发明名称 |
DEVICE FOR PLASTIC DEFORMATION OF SEMICONDUCTOR MATERIALS |
| 摘要 |
A device for plastic deformation of semiconductor materials includes a bearing tube with fixation elements and the elements for fixation of the sample under investigation, and loader connected to it. Part of the bearing tube with elements for fixation of the test sample is placed in location in tubular furnace where temperature gradient is absent. |
| 申请公布号 |
UA86829(U) |
申请公布日期 |
2014.01.10 |
| 申请号 |
UA20130009259U |
申请日期 |
2013.07.23 |
| 申请人 |
IVAN FRANKO LVIV NATIONAL UNIVERSITY |
发明人 |
PAVLYK BOHDAN VASYLIOVYCH;DIDYK ROMAN IVANOVYCH;SHYKORIAK YOSYP ANDRIIOVYCH;LYS ROMAN MYROSLAVOVYCH;HRYPA ANDRII SERHIIOVYCH;SLOBODZIAN DMYTRO PETROVYCH;KUSHLYK MARKIAN OLEHOVYCH |
| 分类号 |
G01N3/08;H01L21/322 |
主分类号 |
G01N3/08 |
| 代理机构 |
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代理人 |
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