发明名称 Low Maintenance AC Gas Flow Driven Static Neutralizer and Method
摘要 A low maintenance AC gas-flow driven static neutralizer, comprising at least one emitter and at least one reference electrode; a power supply having an output electrically coupled to the emitter(s) and a reference terminal electrically coupled to the reference electrode(s) with the power supply disposed to produce an output waveform that creates ions by corona discharge and to produce an electrical field when this output waveform is applied to the emitter(s); a gas flow source disposed to produce a gas flow across a first region that includes these generated ions and the emitter(s), the gas flow including a flow velocity; and wherein, during a first time duration, the output waveform decreases an electrical force created by the electrical field, enabling the gas flow to carry away from the emitter(s) a contamination particle that may be located within a second region surrounding the emitter(s), and to minimize a likelihood of the contamination particle from accumulating on the emitter(s). The first region may include the second region.
申请公布号 US2008232021(A1) 申请公布日期 2008.09.25
申请号 US20080049350 申请日期 2008.03.16
申请人 MKS INSTRUMENTS, INC. 发明人 GEFTER PETER;LEVIT LAWRENCE;PARTRIDGE LESLIE;GEHLKE SCOTT
分类号 H05F3/00 主分类号 H05F3/00
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