发明名称 |
BRUSH COMPOSITION AND METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE |
摘要 |
A brush composition used for phase-separation of a layer containing a block copolymer on a substrate, the brush composition including a resin component (N), the resin component (N) containing a hydrophobic structural unit (Nx) and a hydrophilic structural unit (Ny), the amount of the structural unit (Ny) within the resin component (N) being 5 mol % or less. |
申请公布号 |
US2016194524(A1) |
申请公布日期 |
2016.07.07 |
申请号 |
US201514957994 |
申请日期 |
2015.12.03 |
申请人 |
TOKYO OHKA KOGYO CO., LTD. |
发明人 |
YAMANO Hitoshi;MATSUMIYA Tasuku;YAHAGI Masahito;KUROSAWA Tsuyoshi;MIYAGI Ken |
分类号 |
C09J5/00;B05D1/36;B05D3/04;C09J125/14;B05D7/00 |
主分类号 |
C09J5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
Kawasaki-shi JP |