Microelectromechanical gyroscope with compensation of quadrature error drift

摘要

A microelectromechanical gyroscope, includes: a supporting body; a first movable mass and a second movable mass, which are oscillatable according to a first driving axis and tiltable about respective a first and second sensing axes and are symmetrically arranged with respect to a center of symmetry; first sensing electrodes and a second sensing electrodes associated with the first and second movable masses and arranged on the supporting body symmetrically with respect to the first and second sensing axis, the first and second movable masses being capacitively coupled to the respective first sensing electrode and to the respective second sensing electrode, a bridge element elastically coupled to respective inner ends of the first movable mass and of the second movable mass and coupled to the supporting body so as to be tiltable about an axis transverse to the first driving axis.

主权项

1. A microelectromechanical gyroscope, comprising:
a supporting body; a first movable mass configured to oscillate with respect to the supporting body along a first driving axis and configured to rotate about a first sensing axis; a second movable mass configured to oscillate with respect to the supporting body along the first driving axis and configured to rotate around a second sensing axis; a first plurality of driving electrodes positioned within the first moveable mass; a second plurality of driving electrodes positioned within the second moveable mass; a first sensing electrode and a second sensing electrode associated with the first movable mass and arranged on the supporting body symmetrically with respect to the first sensing axis, the first movable mass being capacitively coupled to the first sensing electrode and to the second sensing electrode, the first and second sensing electrodes being separated by the first plurality of driving electrodes; and a third sensing electrode and a fourth sensing electrode associated with the second movable mass and arranged on the supporting body symmetrically with respect to the second sensing axis, the second movable mass being capacitively coupled to the third sensing electrode and to the fourth sensing electrode, the third and fourth sensing electrodes being separated by the second plurality of driving electrodes.