发明名称 硬化性組成物、塗布用組成物、硬化膜、レーザ加工方法、および多層配線構造体の製造方法
摘要 To provide a curable composition from which a cured film having a low dielectric constant and a low water-absorption and being capable of laser processing, is obtained, a laser processing method of the cured film, and a process for producing a multilayer wiring structure. A curable composition comprising a fluorinated polyarylene prepolymer (A) having a crosslinkable functional group, a laser processing method comprising irradiating a cured film obtained by curing the composition with laser light to remove a part of the cured film, and a process for producing a multilayer wiring structure, comprising a step of forming a via hole in an insulation film made of the cured film by the processing method.
申请公布号 JP6020464(B2) 申请公布日期 2016.11.02
申请号 JP20130544328 申请日期 2012.11.15
申请人 旭硝子株式会社 发明人 伊藤 昌宏;鶴岡 薫;桑名 保宏;永井 雄介
分类号 C08F290/06;B23K26/00;B23K26/36;B23K26/38;C08L71/10 主分类号 C08F290/06
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