| 摘要 |
PROBLEM TO BE SOLVED: To provide an alignment mark exhibiting excellent wash resistance while facilitating optical identification, and capable of preventing occurrence of foreign material failure, metallic contamination, and the like, and to provide a template with the mark, and a manufacturing method with the template.SOLUTION: The alignment mark of a template consists of a part composed of a first material composing a light permeable substrate, and a part composed of a second material having optical characteristics different from those of the first material. Surface of the second material exposed from the first material is coated with an atomic layer deposition film. |
