发明名称 AQUEOUS WORKING FLUID
摘要 PROBLEM TO BE SOLVED: To provide an aqueous working fluid capable of providing good cutting accuracy by suppressing deflection of wires even in the case of cutting brittle materials by using a wire having a narrow wire diameter.SOLUTION: An aqueous working fluid for use at cutting brittle materials by wire saw is produced by blending water soluble polymers and an average molecular weight of the water soluble polymers is 3×10to 6×10and a viscosity at 25°C of the aqueous working fluid is 1.5 mPa s to 15 Pa s.
申请公布号 JP2014009313(A) 申请公布日期 2014.01.20
申请号 JP20120147683 申请日期 2012.06.29
申请人 IDEMITSU KOSAN CO LTD 发明人 KITAMURA TOMOHIKO
分类号 C10M171/00;B24B27/06;B28D5/04;B28D7/02;C10M107/34;C10M173/02;C10N20/02;C10N20/04;C10N30/00;C10N40/22;H01L21/304 主分类号 C10M171/00
代理机构 代理人
主权项
地址