| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer system capable of connecting workpiece machining apparatuses in the serial direction and also connecting them orthogonally to the serial direction. SOLUTION: This workpiece transfer system connected with XY positioning stages in the serial direction is characterized by having a new workpiece machining apparatus disposed orthogonally to the serial connecting direction corresponding to a prescribed workpiece machining apparatus, a catch preventing means provided between the prescribed workpiece machining apparatus and the new workpiece machining apparatus and preventing a workpiece from being caught between the workpiece machining apparatuses when transferring the workpieces, and Y-axial direction transferring means provided in the prescribed workpiece machining apparatus and the new workpiece machining apparatus, respectively, and transferring workpieces between the prescribed workpiece machining apparatus and the new workpiece machining apparatus. COPYRIGHT: (C)2008,JPO&INPIT
|
