STORAGE METHOD OF RESIST SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a storage method of a resist substrate capable of improving stability of resolution and uniformity for a large area when a resist constituted by containing an incomplete oxide of a transition metal is applied to thermal lithography.SOLUTION: The storage method of a resist substrate includes storing in an environment whose relative humidity is 30% or lower a resist substrate containing a resist layer containing an incomplete oxide of a transition metal and a substrate on a surface of which the resist layer is deposited.