| 摘要 |
PROBLEM TO BE SOLVED: To provide exposure equipment that uses two or more short-sized lamps as a light source, and that can perform light exposure having low illuminance unevenness by a simple structure; and the exposure equipment in which lamp exchange is easy.SOLUTION: Exposure equipment 100 includes: a transportation part 2 in which a body to be light exposed 11 is transported in a transportation direction; and a light irradiation part 3 in which two or more light irradiation units 31 that includes a rod-like light source 32 in which a length of a longer direction is shorter than that of the body to be light exposed 11, and a polarizer 34 disposed between the light source 32 and the body to be light exposed 11 are disposed in a horizontal surface to be arranged at a regulated interval. In the light irradiation unit 31, the light source 32 and the polarizer 34 are disposed to be parallel to the body to be light exposed 11, and a polarization axis direction of each polarizer 34 is set in a regulated direction to the transportation direction, each light source 32 is disposed so that a longer direction of the light source 32 is parallel or an oblique direction to the transportation direction. The exposure equipment 100 includes oscillation means 56b that makes the body to be light exposed 11 or the light irradiation part 3 oscillate in a direction crossing with the transportation direction. |
