| 摘要 |
A method for processing a substrate is provided to prevent pollution of circulating air in a receiving container by using a substrate receiving unit and a fan filter unit. Plural substrate processing apparatuses process a substrate(1). A receiving shelf(5) has plural receiving units(4) for receiving a receiving container(2). Substrate entrances are prepared for the substrate processing apparatus. A substrate transfer device(7) withdraws the substrate out of the receiving container of the substrate entrance one-by-one to supply it to the substrate processing apparatus. The substrate transfer device receives the substrate out of the substrate processing apparatus in the receiving container of the substrate entrance. A receiving container transfer apparatus(8) transfers the receiving container to the substrate entrance and the receiving unit of the receiving shelf. The receiving container is stored on the receiving shelf. The stored receiving container is transferred to the substrate entrance at each substrate processing apparatus. The receiving container has a first opening and a second opening. The first opening is comprised of an entrance unit for incoming and outgoing the substrate. A fan filter unit(64) circulates air from the second opening toward the first opening. The fan filter unit is installed on a region of the second opening in the receiving container. A cover(65) opens and shuts the entrance of the receiving container. The cover is formed on the entrance of the receiving container. When the receiving container is stored in the receiving container and transferred to the receiving container transfer device, the cover of the receiving container is shut and the fan filter unit circulates the air. When the substrate is transferred from the substrate entrance to the substrate transfer device, the cover of the receiving container is opened and the fan filter unit circulates the air.
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