发明名称 PIEZO ACTUATOR FOR COOLING
摘要 A piezo actuator includes a plurality of layers of ceramic material, a plurality of layers of conductive material interspersed between the plurality of layers of ceramic material, and a plate attached to an end of the actuator. The plate of the piezo actuator includes an overhang portion. ® KIPO & WIPO 2008
申请公布号 KR20080025094(A) 申请公布日期 2008.03.19
申请号 KR20077030810 申请日期 2007.12.28
申请人 INTEL CORP. 发明人 PALANDUZ CENGIZ A.;SAUCIUC IOAN;PAYDAR REZA
分类号 H01L41/24;F04D33/00 主分类号 H01L41/24
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