| 摘要 |
PROBLEM TO BE SOLVED: To provide a device having a mechanism using lubricant in a vacuum vessel, and causing no defect nor fault in a sample brought into the vacuum vessel, even if lubricating oil or grease are applied to the device. SOLUTION: This device such as a CD-SEM has the mechanism using the lubricant in the vacuum vessel. The lubricant (oil, grease), of which an amount of adsorption per minute to the surface of a substance brought into the vacuum vessel of a lubricant evaluating device is less than 0.09 ng/cm<SP>2</SP>after reaching an equilibrium state after starting evacuation, is used for the mechanism in the vacuum vessel. COPYRIGHT: (C)2008,JPO&INPIT |
