发明名称 |
OPTICAL ASSEMBLY, PROJECTION EXPOSURE APPARATUS AND PROJECTION OBJECTIVE |
摘要 |
In some embodiments, the disclosure relates to an optical assembly that includes an optical element and a structure element. A gap runs between the optical element and the structure element. A sealing element may be present to seal the gap. At least one liquid layer may be arranged between the structure element and/or the optical element, and the sealing element so that a relative displacement of the sealing element with respect to the structure element and/or the optical element is possible in the direction of the layer plane.
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申请公布号 |
US2008316621(A1) |
申请公布日期 |
2008.12.25 |
申请号 |
US20080143322 |
申请日期 |
2008.06.20 |
申请人 |
WEBER JOCHEN;MERZ ERICH;FLUEGGE OLE;BERROTH KAI-UWE;BUEHLER CORNELIA;HAUF MARKUS |
发明人 |
WEBER JOCHEN;MERZ ERICH;FLUEGGE OLE;BERROTH KAI-UWE;BUEHLER CORNELIA;HAUF MARKUS |
分类号 |
G02B7/02 |
主分类号 |
G02B7/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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