| 摘要 |
Provided is a surface shape measuring method for measuring the surface shapes of samples (W1 and W2) by detecting such displacements of measuring elements (16 and 26) as are caused by the roughness of the surfaces of the samples (W1 and W2) when the measuring elements (16 and 26) are slid on those surfaces. The surface shape measuring method detects initial displacements or the displacements of the measuring elements (16 and 26) at the time when the measuring elements (16 and 26) are made to contact the measurement starting points on the surfaces of the samples (W1 and W2), and compares the displacements, which are detected while the measuring elements (16 and 26) are being slid on those surfaces, of the measuring elements (16 and 26) with the initial displacements, thereby to decide whether or not the measuring elements (16 and 26) have reached the measurement ending points. |
