发明名称 METHOD FOR ASSEMBLING SUBSTRATES
摘要 The present invention concerns a method for assembling a first face (3) of a first substrate (1) and a first face (7) of a second substrate (5), characterised in that it comprises: forming an interlayer (11) between the first face (3) of the first substrate (1) and the first face (3) of the second substrate (5), the interlayer (11) being in contact with the first face (3) of the first substrate (1) and with the first face (7) of the second substrate (5); eliminating the interlayer (11) and bringing the first face (3) of the first substrate (1) into contact with the first face (7) of the second substrate (5).
申请公布号 WO2016156279(A1) 申请公布日期 2016.10.06
申请号 WO2016EP56748 申请日期 2016.03.29
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES 发明人 FOURNEL, Frank;BAILLIN, Xavier;CHERAMY, Séverine;DIEM, Bernard;ERNST, Thomas;LEDUC, Patrick
分类号 H01L21/683;H01L21/18 主分类号 H01L21/683
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