| 摘要 |
The present invention relates to a method of pumping in a pumping system (SP, SPP) comprising: a primary lubricated vane screw vacuum pump (3) with a gas inlet opening (2) linked to a vacuum chamber (1) and a gas outlet opening (4) that opens into a conduit (5) before opening into the gas outlet (8) of the pumping system (SP, SPP), a check valve (6) positioned in the conduit (5) between the gas outlet opening (4) and the gas outlet (8), and an ejector (7) connected in parallel with the check valve (6). According to said method, the primary lubricated vane screw vacuum pump (3) is operated in order to pump the gases contained in the vacuum pump (1) through the gas outlet opening (4); simultaneously, the ejector (7) is supplied with motive medium, and the ejector (7) continues to be supplied with motive medium throughout the time that the primary lubricated vane vacuum pump (3) is pumping the gases contained in the vacuum chamber (1) and/or throughout the time that the primary lubricated vane vacuum pump (3) is maintaining a predefined pressure in the vacuum chamber (1). The present invention also relates to a pumping system (SP, SPP) suitable for being used for implementing said method. |
