发明名称 Fluid storage and dispensing system
摘要 A fluid storage and dispensing system (10) comprising a vessel (12) for holding a fluid (17) at a desired pressure. The vessel has a pressure regulator (26) set at a predetermined pressure. The regulator may be interiorly or exteriorly positioned, single-staged or multi-staged, and is associated with a port of the vessel. A dispensing assembly, e.g. including a flow control means such as a valve (20), is arranged in gas/vapor flow communication with the regulator (26), whereby the opening of the valve effects dispensing of gas/vapor from the vessel (12). The fluid in the vessel may be constituted by a liquid that is confined in the vessel at a pressure in excess of its liquefaction pressure at prevailing temperature conditions, e.g. ambient (room) temperature.
申请公布号 AU3766199(A) 申请公布日期 1999.11.16
申请号 AU19990037661 申请日期 1999.04.28
申请人 ADVANCED TECHNOLOGY MATERIALS, INC. 发明人 LUPING WANG;GLENN TOM
分类号 C23C14/24;C23C16/448;F17C1/00;F17C7/00;F17C7/02;F17C7/04;F17C9/02;F17C11/00;F17C13/00;F17C13/02;F17C13/04;H01L21/205;H01L21/265;H01L21/306 主分类号 C23C14/24
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