发明名称 Device for fixing substrates
摘要 An apparatus for fixing and centering substrates that are each provided with an inner hole is provided. The apparatus has a housing having an axis that extends perpendicular to the plane of a substrate placed on the apparatus. A fixation unit is guided in the housing and is introducible into the inner hole of a substrate. The fixation unit includes an outer element that is moveable along the axis of the housing and relative to the housing, and also includes an inner element that is moveable along the axis of the housing and relative to the housing and to the outer element, which, by way of a relative movement of the inner and outer elements, is expandable for engagement with the inner hole of a substrate.
申请公布号 AU3606299(A) 申请公布日期 1999.11.16
申请号 AU19990036062 申请日期 1999.04.14
申请人 STEAG HAMATECH AG 发明人 LUDWIG DENZLER;ULRICH SPEER;KLAUS WEBER
分类号 G11B7/26;B65G49/07;F16B19/10;G11B17/028;G11B23/00;H01L21/68;H01L21/687 主分类号 G11B7/26
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