Improved SAW pressure sensors and manufacturing methods thereof. A SAW wafer including a number of SAW transducers disposed thereon may be provided. A cover wafer may also be provided, with a glass wall situated between the cover wafer and the SAW wafer. The cover wafer may be secured to the SAW wafer such that the glass wall surround the SAW transducers. In some instances, the glass wall may define, at least in part, a separation between the cover wafer and the SAW wafer. One or more contours may also be provided between the cover wafer and the SAW wafer such that at least one of the contours surrounds at least one of the SAW transducers when the cover wafer is disposed over and secured relative to the SAW wafer.
申请公布号
WO2007067453(A3)
申请公布日期
2007.08.30
申请号
WO2006US46154
申请日期
2006.12.01
申请人
HONEYWELL INTERNATIONAL INC.;COBIANU, CORNEL, P.;PAVELESCU, IOAN;AVRAMESCU, VIOREL, V.;COOK, JAMES, D.;MCNALLY, LEONARD, J.
发明人
COBIANU, CORNEL, P.;PAVELESCU, IOAN;AVRAMESCU, VIOREL, V.;COOK, JAMES, D.;MCNALLY, LEONARD, J.