Flange device for vacuum-tightly connecting vacuum component i.e. piping component, with counter flange, has ring piece connected with base piece by elastic sealing ring and exhibiting degree of freedom for movement opposite to base piece

摘要

The flange device (8) has a ring piece (18) mechanically connected with a counter flange (10), and an elastic sealing ring (22) working together with a sealing surface of the counter flange. The elastic sealing ring is arranged at the ring piece. The ring piece comprises another sealing surface for co-operation with another elastic sealing ring (23) that is arranged at the counter flange. The ring piece is vacuum-tightly connected with a base piece (19) by using the elastic sealing ring (23) and exhibiting a degree of freedom for movement opposite to the base piece.