| 摘要 |
A Raman spectroscope 10 comprising: a beam shaping means that uses a multi-slit 28 having a plurality of apertures 30 lined up at the same pitch in one direction and shapes a laser light into a multi-beam; an objective lens 12 that condenses the multi-beam and forms, on a sample S, a plurality of beam spots IC that are lined up in a straight line; an image forming lens 18 that forms an intermediate image IA of light from the plurality of beam spots IC; a before-spectrometer slit 22 provided at the position of the intermediate image IA; and a spectrometer 50 and a CCD detector 60 that disperse light that has passed through this slit 22 and detect a spectral image of a beam spots IC. The Raman spectroscope also comprises: a travel device 32 that advances the plurality of apertures 30, at half pitch only, in the arrangement direction of the apertures; and a control device 70 that links the action of this travel device 32 and the detection cycle of the CCD detector 60. |
