| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing system capable of preventing work efficiency from deteriorating.SOLUTION: A substrate processing system comprising a substrate processing device which performs substrate processing, a group management device which collectively acquires information related to the substrate processing device from the substrate processing device, and a terminal device which acquires information related to the substrate processing device via the group management device comprises: storage means for storing information related to an operator of the terminal device and information related to display of the information related to the substrate processing device in the terminal device; and control means for controlling display of information related to the substrate processing in the terminal device on the basis of information related to the information related to the operator of the terminal device stored in the storage means and information related to display of information related to the substrate processing device in the terminal device. |
