发明名称 位相板
摘要 A phase plate for a charged particle beam system, such as a transmission electron microscope (TEM), is described. The phase plate comprises a support (21) having a through-hole (24) and an elongate member (25) which is magnetisable in a direction along its length and which extends partially across the through-hole and which is narrower than the through-hole.
申请公布号 JP6055643(B2) 申请公布日期 2016.12.27
申请号 JP20120228975 申请日期 2012.10.16
申请人 株式会社日立ハイテクノロジーズ 发明人 アーサー ブラックバーン
分类号 H01J37/295;H01J37/26 主分类号 H01J37/295
代理机构 代理人
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