| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro-oscillating element excellent in controllability about an oscillating operation of a movable function part. SOLUTION: The micro-oscillating element X1 is provided with: a frame 12; movable function parts 11, 11a; a torsional coupling part 13 which couples the frame 12 and the movable function parts 11, 11a, and defines the rotational axial center A1 of the oscillating operation of the movable function parts 11, 11a; and the comb-teeth electrode 14 and the comb-teeth electrode 16 for generating the driving force of the oscillating operation. The comb-teeth electrode 14 has: a first conductive part and a second conductive part electrically connected; and a plurality of electrode teeth 14A wherein the insulating part between the first and second conductive parts respectively have the laminated structures continuing to the direction of the oscillating direction. The comb-teeth electrode 16 has a plurality of electrode teeth 16A facing the first conductive part without facing the second conductive part of the electrode-teeth 14A during non-driving. The electrode-tooth 16A is longer than the first conductive part of the electrode tooth 14A in the direction of oscillating operation. COPYRIGHT: (C)2006,JPO&NCIPI
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