| 摘要 |
A probe cleaner and a cleaning method thereof are provided to clean a tip of probe without causing wear of the probe while cleaning, particularly for the tip of probe with unevenness. A cleaning method of a probe cleaner(20) for removing foreign substances attached onto a tip of probe, comprises the steps of: installing the probe cleaner on a surface of a table, wherein the probe cleaner comprises a cleaner sheet(21) having a surface(24) made of micro fibers(25) and abrading particles(26) fixed onto a surface of the micro fibers at the surface; poking the tip of the probe into the surface, and reciprocating the prove in a direction of thickness of the surface.
|
