| 摘要 |
PROBLEM TO BE SOLVED: To enable a transfer mechanism to smoothly shift to levitation transfer from other than levitation transfer in the substrate transfer apparatus. SOLUTION: The substrate transfer apparatus 3 is constituted with levitation plates 8A, 8B for levitating a substrate 1, a holding transfer mechanism for holding the substrate 1 to move on the levitation transfer route, and a roller transfer mechanism 9 for supporting the substrate 1 to move in the transfer direction at the time of upward movement and for saving it to the lower side of the levitation surface of the levitation plate 8A at the time of downward movement by providing a roller 9a for the levitation surface of the levitation plate 8A in one end of the levitation transfer route. COPYRIGHT: (C)2008,JPO&INPIT
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