发明名称 |
Deposition system with electrically isolated pallet and anode assemblies |
摘要 |
A system for substrate deposition. The system includes a wafer pallet and an anode. The wafer pallet has a bottom and a top. The top of the wafer pallet is configured to hold a substrate wafer. The anode has a substantially fixed position relative to the wafer pallet and is configured to move with the wafer pallet through the deposition chamber. The anode is electrically isolated from the substrate wafer. |
申请公布号 |
US2008230372(A1) |
申请公布日期 |
2008.09.25 |
申请号 |
US20070726894 |
申请日期 |
2007.03.22 |
申请人 |
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发明人 |
COUSINS PETER;LUAN HSIN-CHIAO;PASS THOMAS;FERRER JOHN;GALLARDO REX;MEYER STEPHEN F. |
分类号 |
C23C14/00 |
主分类号 |
C23C14/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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