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发明名称
BEHANDLUNGSEINRICHTUNG FÜR WAFER
摘要
申请公布号
DE50114590(D1)
申请公布日期
2009.01.29
申请号
DE20015014590
申请日期
2001.10.24
申请人
PAC TECH-PACKAGING TECHNOLOGIES GMBH
发明人
TEUTSCH, THORSTEN;ZAKEL, ELKE
分类号
H01L21/00;H01L21/687
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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