| 发明名称 |
Selective overtravel during electrical test of probe cards |
| 摘要 |
An apparatus and method for conducting electrical testing of probes is disclosed. Probes may also be tested for deflection and loading hysteresis. |
| 申请公布号 |
US8659308(B1) |
申请公布日期 |
2014.02.25 |
| 申请号 |
US201213647554 |
申请日期 |
2012.10.09 |
| 申请人 |
RUDOLPH TECHNOLOGIES, INC.;RUDOLPH TECHNOLGIES, INC. |
发明人 |
ANDERSEN JAMES CHARLES |
| 分类号 |
G01R31/00 |
主分类号 |
G01R31/00 |
| 代理机构 |
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代理人 |
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