发明名称 Treatment device for transport and storage boxes
摘要 A treatment device for transport and storage boxes according to the invention comprises a plurality of decontamination modules (24-27) supported by a common chassis (100) and arranged in a row of at least one column (23c) of modules superposed one on top of the other. Each decontamination module (24-27) comprises its own pumping means (6) having at least a primary pump (8a) housed in a primary pumping compartment (8c) that is longitudinally offset from the decontamination chamber (5). Access to the decontamination modules (24-27) is had via side access doors which are all oriented on one and the same access side and which are acted upon by actuating means that automatically close and open them. A lateral transfer zone is provided on the access side, and comprises a robot (29) capable of moving the transport and storage boxes between a frontal loading-unloading station (23a) and the decontamination chambers (5) of each of the decontamination modules (24-27). The amount of space occupied by and the throughput of the treatment device (23) are thus optimized.
申请公布号 US9403196(B2) 申请公布日期 2016.08.02
申请号 US201113806318 申请日期 2011.06.27
申请人 ADIXEN VACUUM PRODUCTS 发明人 Rioufrays Sylvain;Godot Erwan;Favre Arnaud
分类号 B08B5/04;B08B9/44;B08B9/08;H01L21/673;H01L21/677 主分类号 B08B5/04
代理机构 Daly, Crowley, Mofford & Durkee, LLP 代理人 Daly, Crowley, Mofford & Durkee, LLP
主权项 1. A device for treatment of transport and storage boxes, the treatment device comprising: a decontamination module, the decontamination module comprising: a decontamination chamber having a side access door capable of containing a transport and storage box;means for introducing gas into the decontamination chamber;vacuum pumping means for creating a vacuum inside the decontamination chamber;command and control means for controlling the gaseous atmosphere within the decontamination chamber; wherein the device further comprises: a plurality of decontamination modules supported by a common chassis;the decontamination modules are superposed on one another to form at least one column of modules;each decontamination module comprises its own vacuum pumping means having at least a primary pump;the primary pump is housed in a primary pumping compartment that is longitudinally offset with respect to the decontamination chamber;wherein the primary pumping compartments of the decontamination modules of one and the same column of modules communicate with one another with no horizontal separation;each primary pump comprises an air cooling system with a cooling air intake at a first end of the pump and with a cooling air discharge at a second end of the pump;the primary pumping compartments further comprise a first pumping compartment zone receiving all the cooling air discharges and comprising a lower air outlet and a second pumping compartment zone containing all the cooling air intakes and comprising an upper ambient air inlet, wherein the first pumping compartment zone and the second pumping compartment zone are within the primary pumping compartments; andan intermediate vertical wall within the primary pumping compartments that separates the first pumping compartment zone from the second compartment zone.
地址 Annecy FR