内连线之奈米碳管的制程方法,申请号TW099141452-传众专利搜索

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发明名称	内连线之奈米碳管的制程方法
摘要
申请公布号	TWI428274	申请公布日期	2014.03.01
申请号	TW099141452	申请日期	2010.11.30
申请人	国立清华大学新竹市光复路2段101号	发明人	吴欣薇;蔡宗闵;游萃蓉
分类号	B82B3/00;H01L21/683	主分类号	B82B3/00
代理机构		代理人	黄志扬台北市中山区长安东路1段23号10楼之1
主权项
地址	新竹市光复路2段101号

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