| 发明名称 |
GAS LASER DEVICE AND CONTROL METHOD THEREFOR |
| 摘要 |
A gas laser apparatus includes a chamber containing a laser gas, a pair of electrodes disposed within the chamber, a fan disposed within the chamber, a motor connected to a rotating shaft of the fan, and a rotating speed control unit configured to control a rotating speed of the fan based on a wear-out parameter of the pair of electrodes. |
| 申请公布号 |
US2016359291(A1) |
申请公布日期 |
2016.12.08 |
| 申请号 |
US201615240162 |
申请日期 |
2016.08.18 |
| 申请人 |
Gigaphoton Inc. |
发明人 |
ASAYAMA Takeshi;TSUSHIMA Hiroaki;KAKIZAKI Kouji;WAKABAYASHI Osamu |
| 分类号 |
H01S3/038;H01S3/00;H01S3/225;H01S3/036 |
主分类号 |
H01S3/038 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A gas laser apparatus comprising:
a chamber containing a laser gas; a pair of electrodes disposed within the chamber; a fan disposed within the chamber; a motor connected to a rotating shaft of the fan; and a rotating speed control unit configured to control a rotating speed of the fan based on a wear-out parameter of the pair of electrodes. |
| 地址 |
Tochigi JP |
