A transducer is provided herein which comprises an unbalanced proof mass (51), and which is adapted to sense acceleration in at least two mutually orthogonal directions. The proof mass (51) has first (65) and second (67) opposing sides that are of unequal mass.
申请公布号
WO2005017536(A1)
申请公布日期
2005.02.24
申请号
WO2004US21927
申请日期
2004.07.06
申请人
FREESCALE SEMICONDUCTOR, INC.;MCNIEL, ANDREW, C.;LI, GARY, G.;KOURY, DANIEL, N., JR.
发明人
MCNIEL, ANDREW, C.;LI, GARY, G.;KOURY, DANIEL, N., JR.
