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发明名称
Optisches Abtastgerät mit diffraktiver Linse zur Kompensierung von Temperatur abhängigen Fokusverschiebungen
摘要
申请公布号
DE69830684(D1)
申请公布日期
2005.08.04
申请号
DE19986030684
申请日期
1998.04.15
申请人
CANON K.K., TOKIO/TOKYO
发明人
ISHIBE, YOSHIHIRO;FUJIBAYASHI, KAZUO;HOSHI, KOJI
分类号
G02B26/12;(IPC1-7):G02B26/10;G02B27/00
主分类号
G02B26/12
代理机构
代理人
主权项
地址
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