| 摘要 |
PROBLEM TO BE SOLVED: To provide a user-friendly X-ray inspection system for solving problems, wherein improvement of image quality and following response to a moving field of view are opposite to each other. SOLUTION: The X-ray inspection system comprises: a frame image data generating section 31 which generates frame image data of a perspective X-ray image repeatedly from by frame, based on an image signal obtained by the photographic process of an X-ray detector in an X-ray measuring optics 13; a fine image data generating section 32, which stores image data for generating fine image data into an image buffer memory 24 and generates the fine image data by using the stored image data and the latest frame image data of the perspective X-ray image; a display device 23 for displaying the image data; view field adjusting sections 14, 33 for adjusting the positional relation between an object to be measured and the X-ray measuring optics, in order to vary the measurement view field with respect to the object to be measured; a view field variation determining section 34 which determines as to whether the measurement view field is varied; and an image mode changing section 35 which displays the frame image data if the view field is decided to be in its varied state, and displays the fine image data, if the view field is determined as being constant. COPYRIGHT: (C)2007,JPO&INPIT
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