| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film gas sensor, capable of averting the effects of stress changes between an electrical insulation layer and a sensing layer using a simple constitution and suppressing the occurrence of microcracks. SOLUTION: A stabilizing layer 16, such as a partially-stabilized zirconia membrane intermediate layer, is provided between the electrical insulation layer 14 and the sensing layer 15b for absorbing the stress changes between the electrical insulation layer 14 and the gas sensing layer 15b, by deformations of the stabilizing layer 16 in the membrane gas sensor 1. In addition, by making the stabilizing layer, provided between the electrical insulation layer and the sensing layer join tightly to them, stress changes between the electrical insulation layer and the sensing layer are averted in the membrane gas sensor. COPYRIGHT: (C)2007,JPO&INPIT
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