| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitance type pressure sensor having high measurement accuracy. SOLUTION: The pressure sensor 1 includes a capacitor constituted of the first electrode 5 formed on a lower side substrate 2 and the second electrode 10 formed on the under surface of a diaphragm 9 on an upper side substrate 3, and a vacuum cavity 18 is demarcated between the first and second electrodes. A dielectric film 8 having a section shape inclined moderately upward from a center part 8a toward the outside and furthermore inclined moderately downward toward the outside over a top part 8b is laminated on the second electrode 10. Though the contact area between the second electrode and the dielectric film is proportional to the square of the distance (radius) from the center part to the fringe of the contact face, since the film thickness of the dielectric film is increased moderately from the center part toward the top part and then decreased moderately over the top part, linearity of a capacitance of the capacitor with respect to an external pressure can be secured. COPYRIGHT: (C)2007,JPO&INPIT
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