| 摘要 |
A micropump having a diaphragm portion, a valve portion of an intake-side check valve, and a valve portion of a discharge-side check valve formed in a single elastic-member sheet. A piezoelectric actuator is attached onto a back surface of the diaphragm portion. The elastic-member sheet is sandwiched between a first case member and a second case member, the elastic-member sheet providing sealing between both case members. A vibration chamber is defined between the elastic-member sheet and the first case member, the vibration chamber housing the piezoelectric actuator. A pump chamber is defined between the elastic-member sheet and the second case member.
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