发明名称 |
Work Processing System and Plasma Generating Apparatus |
摘要 |
A work processing system S is provided with a plasma generating unit PU including a microwave generator 20 for generating microwaves of 2.45 GHz, a waveguide 10 for causing the microwaves to travel and a plasma generator 30 mounted on a surface of the waveguide 13 facing a work W; and a work conveyor C for conveying the work W to pass the plasma generator 30. The plasma generator 30 includes a plurality of arrayed plasma generating nozzles 31 for receiving the microwaves, generating a plasma-converted gas based on a receiving electrical energy and discharging the generated gas. The plasma-converted gas is blown to the work W in the plasma generator 30 while the work W is conveyed by the work conveyor C. It is possible both to successively plasma-process a plurality of works and to efficiently plasma-process works having large areas.
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申请公布号 |
US2009056876(A1) |
申请公布日期 |
2009.03.05 |
申请号 |
US20060087082 |
申请日期 |
2006.01.30 |
申请人 |
NORITSU KOKO CO., LTD.;AMARANTE TECHNOLOGIES, INC. |
发明人 |
KIM JAY JOONGSOO;LEE SANG HUN;ARAI KIYOTA |
分类号 |
C23C16/511;C23F1/02 |
主分类号 |
C23C16/511 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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