ACCELERATION AND ANGULAR VELOCITY RESONANT DETECTION INTEGRATED STRUCTURE, AND RELATED MEMS SENSOR DEVICE

摘要

An integrated detection structure has a first inertial mass and a second inertial mass, each of which is elastically anchored to a substrate and has a linear movement along a first horizontal axis, a first detection movement of rotation about a first axis of rotation parallel to a second horizontal axis and a second detection movement of translation along the second horizontal axis; driving electrodes cause linear movement of the inertial masses, in opposite directions of the first horizontal axis; a pair of flexural resonator elements and a pair of torsional resonator elements are elastically coupled to the inertial masses, the torsional resonator elements having a resonant movement of rotation about a second axis of rotation and a third axis of rotation, parallel to one another and to the first axis of rotation.

主权项

1. An integrated detection structure comprising:
a substrate; first, second, and third anchors coupled to the substrate; first and second elastic elements coupled to the first and second anchors; a movable mass suspended over the substrate and coupled to the first and second anchors by the first and second elastic elements; a first resonator element having a first end coupled to the first elastic element and a second end coupled to the third anchor, the first resonator element being elastically coupled to the movable mass by the first elastic element; a second resonator element having a first end coupled to the second elastic element and a second end coupled to the third anchor, the second resonator element being elastically coupled to the movable mass by the second elastic element; and a set of drive electrodes configured to drive the movable mass to move in a first plane and to drive the first and second resonator elements to resonate at a first natural resonance frequency, wherein the first and second resonator elements are configured to resonate at a second natural resonance frequency that is different than the first natural resonance frequency in response to the integrated detection structure being rotated.