发明名称 Method of preparing metal surfaces
摘要 A method of preparing an ultra-flat metal surface involves providing a layer of a crystalline metallic material on an ultra-flat substrate surface that is relatively harder than the metallic material layer and then impinging the metallic material layer with incoming metal atoms that are deposited as an additive crystalline layer thereon, wherein at least a lattice constant of the additive crystalline layer is different enough from a lattice constant of the crystalline metallic material layer resulting in a reduction of roughness of the surface of the metallic material layer adjacent to the substrate surface. The metallic material layer having an ultra-flat surface then is separated by template stripping or other technique from the substrate surface for further use of the ultra-flat surface.;27
申请公布号 US2016333459(A1) 申请公布日期 2016.11.17
申请号 US201614999340 申请日期 2016.04.26
申请人 Iowa State University Research Foundation, Inc. 发明人 Thuo Martin;Chen Jiahao;Tevis Ian D.
分类号 C23C14/16;C23C14/34 主分类号 C23C14/16
代理机构 代理人
主权项 1. A method of preparing an ultra-flat metal surface, comprising: providing a layer of a metallic material on an ultra-flat substrate surface wherein the substrate is relatively harder than the metallic material layer; impinging the metallic material layer residing on the substrate surface with incoming metall/metalloid atoms including depositing the incoming metallic atoms as an additive layer having at least a reference or measured lattice constant different enough from a reference or measured lattice constant of the metallic material layer that results in reduced surface roughness of the surface of the metallic material layer adjacent to the substrate surface; and separating the metallic material layer from the substrate surface.
地址 Ames IA US