发明名称 |
SOI lens structure for medical probe |
摘要 |
An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for a forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. The refractive lens is preferably formed using grey-scale lithography and dry etching the first layer. |
申请公布号 |
US8675293(B2) |
申请公布日期 |
2014.03.18 |
申请号 |
US20100693186 |
申请日期 |
2010.01.25 |
申请人 |
FLANDERS DALE C.;GETZ JAMES W.;WHITNEY PETER S.;KUZNETSOV MARK E.;COOK CHRISTOPHER C.;AXSUN TECHNOLOGIES, INC. |
发明人 |
FLANDERS DALE C.;GETZ JAMES W.;WHITNEY PETER S.;KUZNETSOV MARK E.;COOK CHRISTOPHER C. |
分类号 |
G02B7/02 |
主分类号 |
G02B7/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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